ZMI-4104C | Laser Displacement Measurement Interferometer

Measurement Boards

ZMI™ Series – Displacement Measurement Interferometers

ZMI Displacement Measurement Boards

ZMI™ displacement measurement boards utilize optical signals emitted by an interferometer driven by a ZMI™ laser source to calculate displacement.

The ZMI™ 501A features a convenient, stand-alone housing providing two measurement axes.

The ZMI™ 2400, 4000, and 4100 series boards offer sub-nanometer resolution for the most challenging position metrology applications. These boards can be modularly added to VME chassis, supporting expansion to up to 64 measurement axes.

Our proprietary cyclic error reduction option automatically and seamlessly eliminates inherent nonlinear errors common in DMI systems, achieving the highest measurement accuracy.

Related Product Recommendations

• Interferometer Optics Kit: A comprehensive set of optics (ZMI-4110A or similar) including beam splitters, retroreflectors, and mounting hardware tailored for specific measurement types (linear, angular, flatness).

• Environmental Compensation Station: The ZMI-4003 Environmental Compensation System, which includes precisely matched air temperature, pressure, and humidity sensors.

• Vibration Isolation Table: A critical accessory like a Newport RS4000 series optical table to provide the stable mechanical foundation required for nanometer-scale measurements.

• Data Acquisition & Analysis Software: Zygo's MetroPro® software or recommendations for third-party LabVIEW® drivers and analysis packages.

For detailed application engineering, system configuration, or to discuss your specific nanometer-scale measurement challenge, please contact us immediately.
● Contact Information:
* WhatsApp: [https://wa.me/+86 19389860630](https://wa.me/+86 19389860630)
* Email: hnjlyori@163.com

Model: 501A 2400 4004 4104(C)
Number of Axes/Boards: 2 1 or 2 4
Board Type: Housing 6U VME 6U VME64x
Minimum Optical Power: 8.0 µW 1.9 µW 1.0 µW 0.07 µW
Position Resolution: 1.24 nm 0.31 nm 0.15 nm
Maximum Speed: ±0.475 m/s ±2.1 m/s ±2.55 m/s
Accuracy at Maximum Speed ​​(σ): 1.6 nm 0.5 nm 0.2 nm
Cyclic Error Compensation: No Yes
Compatible Lasers: 7705 7702, 7714 and 7724
Note: Specifications are for two-pass interferometers.